PCTFE-based precision vacuum pump fluids. Nonflammable and chemically inert, used in semiconductor plasma etch/CVD, reactive-gas handling and pharmaceutical cGMP dry vacuum pumps. 0% weight loss against Lewis acid attack versus PFPE. Supplied from Korea stock.
Dry (oil-free) vacuum pumps were developed in the semiconductor industry in the 1980s and adopted in chemical and pharmaceutical processes in the 1990s. Built as multi-stage Roots, screw or claw compressors, their core value is preventing product contamination without any auxiliary liquid (a mandatory requirement in cGMP pharmaceutical plants).
The key lubrication and sealing points of such pumps (e.g. SIHIdry, TAIKO, Northey, Busch COBRA families) require a chemically inert fluid that withstands the process gases. HaloVac is a PCTFE fluid proven in this field for over 60 years.
Oxygen, chlorine and nitrous oxide service. Withstands the following reactive media:
PCTFE vs PFPE — In Lewis acid (AlCl₃) resistance testing, HaloVac shows 0% weight loss, while PFPE loses 15.9–17.0%. It is more stable than PFPE in semiconductor etch and strongly oxidizing environments, and more economical too.
A higher number means higher viscosity. Select according to your vacuum level and temperature conditions.
| Property | HaloVac 60 | HaloVac 100 | HaloVac 125 | HaloVac 190 |
|---|---|---|---|---|
| Density @ 20°C (g/cm³) | 1.95 | 1.96 | 1.96 | 1.97 |
| Viscosity @ 20°C (cSt) | 230 | 438 | 582 | 969 |
| Viscosity @ 40°C (cSt) | 52 | 86 | 107 | 161 |
| Viscosity @ 100°C (cSt) | 4.9 | 6.4 | 7.2 | 9.1 |
| Pour point (°C) | -27 | -12 | -10 | -6 |
| Vapor pressure @ 25°C (mmHg) | 0.0016 | 0.0004 | 0.0003 | 0.0001 |
| Flash point | None (nonflammable) — all grades | |||
All grades are chemically inert, nonflammable and low vapor pressure, and compatible with metals, plastics and elastomers. For exact specifications, refer to the HQ TDS and the Wholesale Industry technical sales team. Please inquire for detailed conditions such as service-temperature limits.
Tell us your pump model, process gases, vacuum level and temperature conditions, and we'll reply with the right grade plus a sample and quote. Genuine product supplied direct from HQ, with TDS/MSDS provided and Korea stock.
